E pei ona tatou iloa uma, e tele faʻamatalaga o sputtering sini, ma o latou faʻaoga fanua e matua lautele foi.O ituaiga o sini e masani ona faʻaaogaina i matata eseese e eseese foi.I aso nei, seʻi o tatou aʻoaʻo e uiga i le faʻavasegaina o le faʻaogaina o fanua faʻatatau ile faʻatonuga o le RSM!
1、 Fa'amatalaga o le sputtering sini
Sputtering o se tasi o tekinolosi autu mo le saunia o mea manifinifi ata tifaga.E fa'aogaina ai ion na gaosia e le puna ion e fa'avavevave ma fa'aputuina i le vacuum e fausia ai se fa'alava o le ion maualuga, fa'ao'o i luga o le malo, ma fa'afesuia'i e le ion le malosi o le kinetic ma atoms i luga o le malo, ina ia mafai ai e atoms i luga o le malo. ua tuueseese le fogaeleele mai le malo ma tuu i luga o le eleele.O le pomu malosi o le mea mataʻutia mo le sauniaina o le ata manifinifi na teuina e ala i le sputtering, lea e taʻua o le sputtering target.
2、 Fa'avasegaina ole sputtering fa'amoemoega talosaga fanua
1. Semiconductor sini
(1) Fuafuaga masani: faʻamoemoe masani i lenei fanua e aofia ai metala maualuga e faʻafefeteina e pei ole tantalum / kopa / titanium / alumini / auro / nickel.
(2) Faʻaaogaina: faʻaaogaina e avea ma mea autu autu mo taʻaloga tuʻufaʻatasia.
(3) Manaoga faʻatinoga: maualuga manaʻoga faʻapitoa mo le mama, tele, tuʻufaʻatasia, ma isi.
2. Fa'atatau mo le fa'aaliga laulau mafolafola
(1) Sini masani: sini masani i lenei fanua e aofia ai le alumini / kopa / molybdenum / nickel / Niobium / silicon / chromium, ma isi.
(2) Fa'aoga: o lenei ituaiga o fa'amoemoe e tele lava ina fa'aoga mo ituaiga eseese o ata tifaga tetele e pei o TV ma api.
(3) Faʻatinoga manaʻoga: maualuga manaʻoga mo le mama, vaega tele, tutusa, ma isi.
3. Mea fa'atatau mo le sola
(1) Sini masani: alumini / kopa / molybdenum / chromium / ITO / Ta ma isi sini mo sela sola.
(2) Faʻaaogaina: faʻaaogaina i le "faʻamalama faʻamalama", puipui puipui, electrode ma ata tifaga conductive.
(3) Manaoga faʻatinoga: maualuga manaʻoga faʻapitoa ma faʻaogaina lautele lautele.
4. Fa'amoemoe mo le teuina o fa'amatalaga
(1) Sini masani: sini masani o cobalt / nickel / ferroalloy / chromium / tellurium / seleni ma isi mea mo le teuina o faʻamatalaga.
(2) Fa'aoga: o lenei ituaiga mea fa'atatau e masani ona fa'aogaina mo le ulu fa'amaneta, vaega ogatotonu ma le vaega pito i lalo ole masini fa'apipi'i ma tisiketi.
(3) Mana'oga fa'atinoga: e mana'omia le maualuga o le teuina ma le televave o felauaiga.
5. Fa'atatau mo le suiga o meafaigaluega
(1) Fa'asologa masani: fa'amoemoe masani e pei o le titanium / zirconium / chromium alumini alumini ua suia e meafaigaluega.
(2) Faʻaaogaina: masani ona faʻaaogaina mo le faʻamalosia o luga.
(3) Manaoga faʻatinoga: manaʻoga maualuga ma le umi o le auaunaga.
6. Fa'atatau mo masini faaeletonika
(1) Fa'atatau masani: fa'amauga alumini alumini masani / silicide sini mo masini fa'aeletoroni
(2) Faamoemoega: e masani ona faʻaaogaina mo faʻamaʻi ata tifaga ma capacitors.
(3) Manaoga faʻatinoga: laʻititi laʻititi, faʻamautu, maualalo le faʻaogaina o le vevela
Taimi meli: Iul-27-2022