O le a le sini o le sputtering?Aiseā e tāua tele ai le taulaʻiga?

E masani ona vaʻaia e le alamanuia semiconductor se taimi mo mea faʻatatau, lea e mafai ona vaevaeina i mea mama ma mea faʻapipiʻi.O mea fa'apipi'i e iai pa'u fa'atekinisi e la'ititi lava pe a fa'atusatusa i mea e gaosia ai wafer.O le fa'agasologa o le gaosiga o fa'ama'i e masani ona aofia ai le 7 ituaiga o mea semiconductor ma vaila'au, e aofia ai le tasi ituaiga o mea e fa'atatau i le sputtering.O le a la le mea e fa'atatau i ai?Aisea e taua tele ai le mea autu?O le asō o le a tatou talanoa e uiga i le mea e faʻatatau i ai!

O le a le mea e fa'atatau i ai?

I se faaupuga faigofie, o le mea fa'atatau o le mea fa'atatau o lo'o fa'aolaina e ni vaega fa'atosina maualuga.E ala i le suia o mea faʻatatau eseese (e pei o le alumini, kopa, uʻamea uʻamea, titanium, nickel targets, etc.), e mafai ona maua faiga ata tifaga eseese (e pei o le superhard, ofu-tetee, anti-corrosion alloy films, ma isi) e mafai ona maua.

I le taimi nei, (mama) sputtering mea autu e mafai ona vaevaeina i:

1) Faʻailoga uʻamea (aluminium uʻamea mama, titanium, kopa, tantalum, ma isi)

2) Alloy sini (nickel chromium alloy, nickel cobalt alloy, etc.)

3) Fua fa'ameamea (oxides, silicides, carbide, sulfides, ma isi).

E tusa ai ma suiga eseese, e mafai ona vaevaeina i: sini umi, faʻailoga sikuea, ma faʻataʻitaʻiga lapotopoto.

E tusa ai ma fanua talosaga eseese, e mafai ona vaevaeina i: sini semiconductor chip, faʻaaliga faʻaaliga faʻapipiʻi, sini o le sola, faʻamatalaga teuina faʻamatalaga, faʻasologa faʻaleleia, faʻaogaina masini eletise, ma isi sini.

I le vaʻavaʻai i lenei mea, e tatau ona e mauaina se malamalamaʻaga o sini faʻamaʻi maualuga, faʻapea foʻi ma le alumini, titanium, kopa, ma le tantalum o loʻo faʻaaogaina i sini uʻamea.I le gaosiga o le semiconductor wafer, o le faiga alumini e masani lava o le auala autu mo le gaosiga o wafers 200mm (8 inisi) ma lalo ifo, ma o mea faʻaoga e faʻaaogaina e masani lava o le alumini ma elemene titanium.300mm (12 inisi) gaosi mea gaosi, e tele lava e fa'aogaina tekonolosi feso'ota'iga apamemea, e fa'aaogaina fa'atatau apamemea ma tantalum.

E tatau i tagata uma ona malamalama po'o le a le mea e fa'atatau i ai.I le aotelega, faatasi ai ma le faateleina o le tele o talosaga chip ma le faateleina o manaoga i le maketi chip, o le a mautinoa lava le faateleina o le manaoga mo mea autu e fa ata tifaga manifinifi i totonu o le alamanuia, e pei o le alumini, titanium, tantalum, ma le kopa.Ma o le taimi nei, e leai se isi fofo e mafai ona suitulaga i nei mea e fa ata manifinifi u'amea.